a) Thickness measurements as a function of cycle for ALE on a SiO
Question 3: (a) A 1000 Å thick SiO2 layer is grown on
a) Thickness measurements as a function of cycle for ALE on a SiO 2
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a) Net etch of SiO 2 and SiN x surfaces as a function of ALE cycles.
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Global Volcanism Program
Etch depth (Å) and etch depth/cycle (Å/cycle) for two Cr ALE methods
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a) TiO2 layer thickness measured by in situ SE as a function of the
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